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EQUIPMENT  Tape Expander

Part Number

TAE-800

TAE enables tape to be uniformly-expanded. Compared to air cylinder method, TAE has stable expandability because motor driving system allows slower speed and steady movement of a stage. (Refer to the table) This is available for both 6 inch and 8inch.

Feature

・The temperature on a stage is adjustable, from room temperature to 100*C.
・Expanding stroke of a stage is adjustable every 1mm.
・Upward speed of a stage is adjustable.
・A tape is cut off with a motor driving system.

【Rising Speed】

Volume Rising Speed(mm/sec)
10 2.2
20 3.7
30 4.8
40 5.8
50~ same as volume 40

Correspondence between Frame and Expand Ring

Frame Size Expand Ring(MAX)
Inside Diameter Outside Diameter
2-5 (inner diameter165mm) 150mm 160mm
2-6 (inner diameter175mm) 160mm 170mm
2-6-1(inner diameter194mm) 180mm 190mm
2-8-1(inner diameter250mm) 230mm 240mm

Specification

Item Maximum Wafer Size
(inch)
Size(W×D×H) Weight(kg)
TAE-800 8 400mm×685mm×350mm 30

* Please make sure to read carefully an instruction manual before using.

*The information contained on this website is presented for the purpose of generally advising potential customers of DENKA about the basic description, properties and characteristics of various DENKA products. DENKA makes no warranty or representation as to the entire accuracy or completeness of the Product Information on this website.
*Please test before use, and confirm agreement to use, and safety in your responsibility.
*Please abandon it according to the law when you abandon our product of this website description and the product that used these.
*Please confirm detailed use and notes, with technical information and Material Safety Data Sheet before it uses.
*Specifications in catalogue may change anytime without prior notice.

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