EQUIPMENT Fully Automatic UV Irradiator
| Part Number |
FTUV-8360 |
Generally, high pressure mercury lamps are used for UV irradiator and this causes an affect on human body and high price. FTUV series is designed to solve these problems by using black fluorescent light. Black fluorescent light peak wave length is 352nm and test results showed this is extremely low ozone generation levels. Besides Nitrogen purge/ Air purge may be injected from the back side of device.
Our series are easy operation and they provide with the appropriate specification (illuminance and wave length) to the UV tape. Besides this FTUV is much more compact than usual fully automatic UV irradiator.
Feature
Able to irradiate UV in full-automation
Rotating turn table allows even irradiation.
4 patterns of UV irradiating conditions to select from
Indication of UV illuminance on the touch panel in real time.
Energy-savings due low illuminance (black fluorescent light).
Selection of a target wafer to irradiate, by scanning frames in a cassette.
Available in 6”/8” frame size
Utility
| Item | Concent |
| Power | AC100V(50/60Hz) |
| Lump power | 1.5kW |
| Size | (W)600mm(D)1,100mm(H)1,600mm |
| Weight | 200kg |
Example of displaying panel
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the purpose of generally advising potential customers of DENKA about
the basic description, properties and characteristics of various DENKA
products. DENKA makes no warranty or representation as to the entire
accuracy or completeness of the Product Information on this website.
*Please test before use, and confirm agreement to use, and safety in your responsibility.
*Please abandon it according to the law when you abandon our product of this website description and the product that used these.
*Please confirm detailed use and notes, with technical information and Material Safety Data Sheet before it uses.
*Specifications in catalogue may change anytime without prior notice.
