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TUV series is used wide range of manufactures from small-lot to mass production which includes research laboratories. Generally, high pressure mercury lamps are used for UV irradiator and this causes an affect on human body and high price. TUV series is designed to solve these problems by using black fluorescent light. Black fluorescent light peak wave length is 352nm and test results showed this is extremely low ozone generation levels. Besides Nitrogen purge/ Air purge may be injected from the back side of device. Our series are easy operation and they provide with the appropriate specification (illuminance and wave length) to the UV tape. Multiple wafers can be irradiated at one time (for 6" frames only) A top panel can be opened and shut, and so lamps can be easily replaced. 

Feature

・Multiple wafers can be irradiated at one time (for 6” frames only)
・Peak Wavelength: 352nm
・Extremely low ozone generation levels, as test results show.
・Nitrogen purge/Air purge may be injected from the back side of the device.

【IS Grade Limited Function】
・Low power consumption (100W)
・The lighting time is shortened by inverter method adoption.
・Easy operation with LC touch screen, which you can confirm illuminance in real time.
・With a safety system, automatically turn off the lights at over 60 degree C. (at 45 degree C automatically revert.)

【Optional Function】
・The glass tray for overall irradiation
・Two tray irradiation at a time method (TUV-815ISW)

SPEC

Product Grade			Standard Grade	IS grade
lrradiation	Timer Setting	Continuous Irradiation	○	○
		Intermittent Irradiation	○	○
	Light Volume Setting	Continuous Irradiation	×	○
		Intermittent Irradiation	×	○
Illuminance Display			×	○
Speedy Lighting			3sec	1sec
Power Consumption			210W	100W
*Option	GlassTray	（Overall Irradiation）	○	○
	Two Side Irradiation	(Two Tray Irradiation Simultaneously)	×	○